Introduction
Microelectromechanical system relates to physics, chemical, optical, medical, electronic engineering, material engineering, mechanical engineering, information engineering and bioengineering and other academic technology and engineering technologies. The manufacturing process of microelectromechanical systems mainly has an integrated circuit process, micrometer / nano manufacturing process, small mechanical process and other specialty processing types. The microelectromechanical system will have a wide range of application prospects in the national economy and military system.
Field
The United States has developed successfully used for automotive anti-collision and fuel-saving microelectromechanical system acceleration table and sensor, which can improve the safety of the car and fuel 10%. This US Department of Defense system can save billions of gasoline fees per year. Microelectromechanical systems can save costs in an aerospace system, improve system flexibility, and will lead to changes in aerospace systems. For example, a sample of a micro inertial measuring device with a scale of 2 cm × 2 cm x 0.5 cm, and 5 grams. In terms of military applications, the US Department of Defense Senior Research Program Bureau is carrying out micro-electromechanical systems for small inertial measuring devices for personal navigation, large-capacity data storage devices, small analysis instruments, medical sensors, fiber optic network switches, environmental and safety monitoring Research on distributed unattended sensing sensing. The bureau has demonstrated an acceleration table manufactured based on microelectromechanical system, which can withstand the impact of nearly 10.5 gravity acceleration generated by the artillery, which can provide an economic guidance system for non-made missile drugs. Imagine military applications of microelectromechanical systems also include: chemical warfare agent, enemy me to identify devices, smart skin, distributed battlefield sensor network, etc.
